DIFFRACTIVE ELEMENT WITH HIGH WAVE-FRONT FLATNESS

摘要

The present invention relates to the creation of a diffractive element that has a high degree of wavefront flatness. The diffractive element has a flat functional substrate with a first side, whereby a fine structure is arranged on or in this first side, and whereby the first side of this functional substrate is arranged on a flat carrier substrate, whereby the carrier substrate has a higher degree of rigidity than the functional substrate.