发明名称 Device for the optical spectroscopy and mechanical switch for such a device
摘要 <p>The system (1) has a lighting unit (3) emitting light to illuminate a sample surface and a reference surface (4). An optical deflector couples a measuring beam (M) and a reference beam (R) to respective inputs of a spectrally resolving detector (5) along the measuring and reference beams from the sample surface to the resolving detector in respective positions. The reference and measuring beams have same etendue and same optical axis between the optical deflector and the resolving detector. The optical deflector is located directly after an input optic (5.1) of the measuring beam.</p>
申请公布号 EP2267420(A1) 申请公布日期 2010.12.29
申请号 EP20100006396 申请日期 2010.06.19
申请人 CARL ZEISS MICROIMAGING GMBH 发明人 CORRENS, NICO;KERSTAN, FELIX;JOCHMANN, DORIS;HOYME, WERNER;DOBSCHAL, HANS-JUERGEN;SEEBER, MARCEL;FREYTAG, LUTZ
分类号 G01J3/28;G01J3/08;G01N21/47 主分类号 G01J3/28
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