| 摘要 |
<p>This invention relates to for coating a substrate comprising: a chamber; a cathodic arc source for generating and projecting a plasma beam along a plasma beam path within the chamber, the projected plasma crossing a horizontal plane within the chamber; a moveable holder having a planar mounting surface that is generally parallel to said horizontal plane, the moveable holder being configured to move the planar mounting surface relative to the horizontal plane within the chamber and into the path of the plasma beam to form a plasma coating on the substrate. (Fig. 1)</p> |
