Manufacturing method for variable shape mirror

摘要

Manufacturing method for variable shape mirrors suitable for mass production includes steps: for forming first grooves 21 and second grooves 31 along boundaries between areas to be variable shape mirrors 1 on a surface of first wafer 20 to be support substrate 2 and a surface of second wafer 30 to be mirror substrate 3; for arranging first and second wafer so that support pillars 5 and piezoelectric elements 4 are sandwiched between first and second wafer at areas with surface on which second grooves are formed facing inward for bonding; for dividing second wafer into mirror substrates by flattening process of outer surface of second wafer until at least reaching second groove; for dividing first wafer into the support substrates by breaking first wafer along first grooves; and for forming reflection film 6 on outer surface of each of mirror substrates obtained by the dividing step.