发明名称 COMPOSITION AND METHOD FOR PRODUCTION THEREOF, POROUS MATERIAL AND METHOD FOR PRODUCTION THEREOF, INTERLAYER INSULATING FILM, SEMICONDUCTOR MATERIAL, SEMICONDUCTOR DEVICE, AND LOW-REFRACTIVE-INDEX SURFACE PROTECTION FILM
摘要 <p>Disclosed is a composition comprising a hydrolysate of an alkoxysilane compound, a hydrolysate of a siloxane compound represented by Formula (1), a surfactant, and an element having an electronegativity of 2.5 or less. In Formula (1), R A and R B independently represent a hydrogen atom, a phenyl group, -C a H 2a+1 , -(CH 2 ) b (CF 2 ) c CF 3 or -C d H 2d-1 , R A and R B are not both hydrogen atoms simultaneously, R C and R D independently represent a single bond that links a silicon atom and an oxygen atom to form a cyclic siloxane structure, or each independently represent a hydrogen atom, a phenyl group, -C a H 2a+1 , -(CH 2 ) b (CF 2 ) c CF 3 , or - C d H 2d-1 , a represents an integer of 1 to 6, b represents an integer of 0 to 4, c represents an integer of 0 to 10, d represents an integer of 2 to 4, and n represents an integer of 3 or greater.</p>
申请公布号 EP2267080(A1) 申请公布日期 2010.12.29
申请号 EP20090728108 申请日期 2009.03.30
申请人 MITSUI CHEMICALS, INC. 发明人 KOHMURA, KAZUO;TANAKA, HIROFUMI
分类号 C08L83/04;C08J9/28;C09D5/25;C09D7/12;C09D183/04;H01L21/312;H01L21/768;H01L23/522 主分类号 C08L83/04
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