| 摘要 |
<p>Provided is an elastic surface wave sensor capable of improving the detection sensitivity. An elastic surface wave sensor (10) is equipped with (a) a piezoelectric substrate (12), (b) IDT electrodes (13) formed on the piezoelectric substrate (12), and (c) a protective film (14) formed on the piezoelectric substrate (12) in such a way as to cover the IDT electrodes (13). The elastic surface wave sensor (10) is configured such that due to the IDT electrodes (13), the plane-wise displacement of a surface (14s) of the protective film (14) is opposite to the plane-wise displacement of the vicinity of the boundary between the piezoelectric substrate (12) and the protective film (14), and that excitation is caused in a higher SH wave mode where the plane-wise displacement amount becomes the largest on the surface (14s) of the protective film (14).</p> |
