| 摘要 |
PURPOSE: A pellicle is provided to prevent dust from an air hole or filter and foreign materials from being attached. CONSTITUTION: A part of an air hole(32) is tapered. An edge(37) is R-chamfered to inspect foreign materials from the outer side. The inner wall of the air hole is polished to Ra 0.5 um. The air hole increases with a taped shape from the inside to the outside of a pellicle frame. |
