CHARGED PARTICLE SELECTION APPARATUS AND CHARGED PARTICLE IRRADIATION APPARATUS

摘要

PURPOSE: A charged particle selection apparatus and a charged particle irradiation apparatus are provided to select an ionized cluster according to a mantissa by deflecting the ionized gas cluster by applying an AC voltage to the electrode. CONSTITUTION: More than three electric field applying units(21~23) apply an electric field in the propagation direction of a gas cluster. A slit(24) assorts the gas cluster. The slit comprises the opening on the extended line of the direction in which the gas cluster enters. The electric field applying unit is composed of two electrodes(22a, 22b).