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发明名称
MAGNETRON SPUTTER CATHODE COMPRISING A COOLING PLATE
摘要
申请公布号
EP1627414(B1)
申请公布日期
2010.12.29
申请号
EP20040709126
申请日期
2004.02.07
申请人
APPLIED MATERIALS GMBH & CO. KG
发明人
KREMPEL-HESSE, JOERG;JISCHKE, ANDREAS;SCHUESSLER, UWE;WOLF, HANS
分类号
H01J37/34;C23C14/34;C23C14/35
主分类号
H01J37/34
代理机构
代理人
主权项
地址
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