发明名称 Transmission electron microscope and method of displaying spectral image
摘要 <p>In order to correct measurement magnification and measurement position of a spectral image with high efficiency and with high accuracy using an electronic spectroscope and a transmission electron microscope regarding the spectral image formed in two orthogonal axes which are an amount of energy loss axis and a measurement position information axis; a method for correcting magnification and position and a system for correcting magnification and position, both of which are capable of correcting measurement magnification and measurement position of a spectral image with high efficiency and with high accuracy using an electronic spectroscope and a transmission electron microscope regarding the spectral image formed in two orthogonal axes which are an amount of energy loss axis and a measurement position information axis, are provided. </p>
申请公布号 EP2256780(A3) 申请公布日期 2010.12.29
申请号 EP20100008339 申请日期 2008.01.24
申请人 HITACHI HIGH-TECHNOLOGIES CORPORATION 发明人 TERADA, SHOHEI;TANIGUCHI, YOSHIFUMI
分类号 H01J37/295;H01J37/26;H01J37/05;H01J37/09 主分类号 H01J37/295
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