COIL, POSITIONING DEVICE, ACTUATOR, AND LITHOGRAPHIC APPARATUS

摘要

PURPOSE: A coil, a positioning device, an actuator, and a lithographic apparatus are provided to supply a motor including a coil without existing disadvantages by including a strip of electrically conductive sheet materials. CONSTITUTION: A patterning device supporting device supports a pattering structure to pattern a projection beam according to the wanted pattern. A substrate table maintains a substrate. A cooling element(20) is adjacent to the upper side(13) and the lower side(14) of a coil(10). A coil has an aluminum sheet(11) with the thickness between 50 to 150 um.