DEVICE FOR CHARGING DRY AIR OR NITROGEN GAS INTO SEMICONDUCTOR WAFER STORAGE CONTAINER AND WAFER STATIC CHARGE REMOVING APPARATUS UTILIZING THE DEVICE,申请号EP20070790472-传众专利搜索

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发明名称	DEVICE FOR CHARGING DRY AIR OR NITROGEN GAS INTO SEMICONDUCTOR WAFER STORAGE CONTAINER AND WAFER STATIC CHARGE REMOVING APPARATUS UTILIZING THE DEVICE
摘要
申请公布号	EP2166566(A4)	申请公布日期	2010.12.29
申请号	EP20070790472	申请日期	2007.07.09
申请人	KONDOH INDUSTRIES LTD.;CAMBRIDGE FILTER JAPAN, LTD.	发明人	KISAKIBARU, TOSHIROU;OKADA, MAKOTO;IIDA, NAOJI;HONDA, YASUSHI
分类号	H01L21/673;H01L21/68	主分类号	H01L21/673
代理机构		代理人
主权项
地址

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