FINE PARTICLE COATING APPARATUS AND FINE PARTICLE COATING METHOD

摘要

Disclosed is a fine particle coating apparatus which is capable of having fine particles collide with a member to be coated at a higher speed using a device having a simpler configuration and without using a high pressure gas. The fine particle coating apparatus is capable of coating an object with fine particles in a shorter time. Also disclosed is a fine particle coating method. The fine particle coating apparatus comprises: a chamber (10) the inside of which is at a reduced pressure; a first direct current power supply (20); a wire-like linear electrode member (30); and a hollow cylindrical electrode member (31) that is provided with a slit (31S) having a width larger than the diameter of fine particles (NR). The fine particles are contained in or supplied to the cylindrical electrode member. In the chamber, the linear electrode member is arranged at the axial position of the cylindrical electrode member without coming into contact with the cylindrical electrode member, and a member to be coated (W) is arranged at a position facing the slit in the chamber. The first direct current power supply provides a first potential difference between the linear electrode member and the cylindrical electrode member, and makes the fine particles in the cylindrical electrode member eject from the slit and collide with the member to be coated.