TEMPLATE PROCESSING DEVICE, IMPRINT SYSTEM, TEMPLATE PROCESSING METHOD, AND COMPUTER STORAGE MEDIUM

摘要

A template processing device forms a film of a release agent on a template on the surface of which a transfer pattern is formed and forms a coating film on the release agent. The template processing device has a processing station for performing predetermined processing on a template and a template carrying-in-and-out station capable of storing a plurality of templates and carrying a template in and out of the processing station. The processing station has a release agent film forming block for forming a film of a release agent on the surface of a template, a coating liquid supplying unit for supplying a coating liquid on the formed release agent film, and a coating liquid filling unit for pressing the coating liquid coated on the release agent into a depression portion of the transfer pattern on the template.