发明名称 COMPUTER GENERATED HOLOGRAM, EXPOSURE APPARATUS, AND DEVICE FABRICATION METHOD
摘要 The present invention provides a computer generated hologram (100) which forms a light intensity distribution on a predetermined plane (PS) by giving a phase distribution to a wavefront of incident light, comprising an anisotropic layer (114) whose refractive index with respect to linearly polarized light in a first direction is different from a refractive index of the anisotropic layer with respect to linearly polarized light in a second direction perpendicular to the linearly polarized light in the first direction, and an isotropic layer (112) whose refractive index with respect to the linearly polarized light in the first direction is equal to a refractive index of the isotropic layer with respect to the linearly polarized light in the second direction.
申请公布号 KR101004872(B1) 申请公布日期 2010.12.28
申请号 KR20080074839 申请日期 2008.07.31
申请人 发明人
分类号 H01L21/027 主分类号 H01L21/027
代理机构 代理人
主权项
地址