SUBSTRATE SUPPORTING UNIT, AND APPARATUS AND METHOD FOR POLISHING SUBSTRATE USING THE SAME,申请号KR20080118105-传众专利搜索

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发明名称	SUBSTRATE SUPPORTING UNIT, AND APPARATUS AND METHOD FOR POLISHING SUBSTRATE USING THE SAME
摘要
申请公布号	KR101004434(B1)	申请公布日期	2010.12.28
申请号	KR20080118105	申请日期	2008.11.26
申请人		发明人
分类号	H01L21/304;B24B37/04;B24B37/30;H01L21/683	主分类号	H01L21/304
代理机构		代理人
主权项
地址

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