METHOD FOR SELECTING SAMPLE POSITIONS ON A SUBSTRATE, METHOD FOR PROVIDING A REPRESENTATION OF A MODEL OF PROPERTIES OF A SUBSTRATE, METHOD OF PROVIDING A REPRESENTATION OF THE VARIATION OF PROPERTIES OF A SUBSTRATE ACROSS THE SUBSTRATE AND DEVICE MANUFACTURING METHOD.,申请号NL20102004887-传众专利搜索

发明名称	METHOD FOR SELECTING SAMPLE POSITIONS ON A SUBSTRATE, METHOD FOR PROVIDING A REPRESENTATION OF A MODEL OF PROPERTIES OF A SUBSTRATE, METHOD OF PROVIDING A REPRESENTATION OF THE VARIATION OF PROPERTIES OF A SUBSTRATE ACROSS THE SUBSTRATE AND DEVICE MANUFACTURING METHOD.
摘要
申请公布号	NL2004887(A)	申请公布日期	2010.12.27
申请号	NL20102004887	申请日期	2010.06.14
申请人	ASML NETHERLANDS B.V.,	发明人	MOS, EVERHARDUS;SIMONS, HUBERTUS;MIDDLEBROOKS, SCOTT
分类号	G03F7/20;G03F9/00	主分类号	G03F7/20
代理机构		代理人
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