发明名称 SEMICONDUCTOR DEVICE AND METHOD FOR MANUFACTURING THE SAME
摘要 PURPOSE: A semiconductor device and a method for manufacturing the same are provided to improve an electrical characteristic with respect to a semiconductor substrate by forming a spiked conductive layer on the semiconductor substrate. CONSTITUTION: An insulating film(110) is deposited on the upper side of a cleaned semiconductor substrate(100). A photo-resist film is formed on the insulating film. A photo-resist film pattern is formed on the photo-resist film through an exposure process and a developing process using a mask for forming a contact region. The insulating film is etched using the photo-resist film pattern as a mask in order to form the contact region. An etchback process is performed with respect to a barrier metal until the semiconductor substrate is exposed.
申请公布号 KR20100135521(A) 申请公布日期 2010.12.27
申请号 KR20090053948 申请日期 2009.06.17
申请人 HYNIX SEMICONDUCTOR INC. 发明人 PARK, HYUNG JIN
分类号 H01L21/28 主分类号 H01L21/28
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