METHOD OF INSPECTING TEMPLATE FOR NANOIMPRINT

摘要

PROBLEM TO BE SOLVED: To provide a method of inspecting a template for nanoimprints for inspecting fine patterns precisely. SOLUTION: The method of inspecting a template for nanoimprints includes: the process for applying light to the template 100 from the back side of the template 100 for nanoimprints where patterns are formed on the surface; the process for detecting near-field light generated near the surface of the template 100 by irradiation with light; and the process for inspecting the template 100, based on the detected near-field light. COPYRIGHT: (C)2011,JPO&INPIT