摘要 |
PROBLEM TO BE SOLVED: To provide an automatic teaching device capable of teaching a teaching position by moving an end effector in one predetermined direction. SOLUTION: A semiconductor conveyance robot 1 includes a hand 2, first and second photoelectric sensors 14 and 15, and a control part 28. The first and second photoelectric sensors 14 and 15 are provided on the hand 2 and have optical axes L4 and L5 extending in directions different from each other. The control part 28 moves the hand 2 toward a predetermined temporary teaching position p<SB>c</SB>, causes the first and second photoelectric sensors 14 and 15 to respectively detect a pin 32 standing on a tool 31 disposed at a correct teaching position p<SB>r</SB>, calculates shift amountsΔr andΔθfrom the correct teaching position p<SB>r</SB>and the temporary teaching position p<SB>c</SB>based on first and second detection positions p<SB>1</SB>and p<SB>2</SB>where the hand 2 is located when detected, so as to obtain the correct teaching position p<SB>r</SB>. The control part 28 moves the hand 2 in a direction different from those directions where the optical axes L4 and L5 extend when it causes the pin 32 to be detected. COPYRIGHT: (C)2011,JPO&INPIT
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