OPTICAL PART HOLDING MEMBER AND PRODUCTION METHOD THEREOF

摘要

PROBLEM TO BE SOLVED: To provide an optical part holding member made of ceramic which has effective air permeability to prevent dew condensation, and to provide a production method thereof.

SOLUTION: The optical part holding member is composed of a silicon nitride ceramic-based composite material to hold an optical part produced through a process of nitriding by reacting silicon with nitrogen. By using the silicon nitride ceramic-based composite material containing silicon carbide and an iron compound, the airflow volume of 50 mL or more per minute is achieved in an effective airflow area of 1.5 cm2when air pressure is added with a pressure difference of 0.4 MPa between both surfaces of a sample of the silicon nitride ceramic-based composite material having 1 mm thickness, and the optical part holding member having effective air permeability to prevent dew condensation is obtained.

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