| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a solid-state imaging element which is easily manufactured by facilitating control over a lens shape, and has excellent characteristics of sensitivity etc. <P>SOLUTION: The solid-state imaging element includes a light reception part 2 formed in a semiconductor substrate 1, an insulating layer 9 formed on the semiconductor substrate 1, a film 11 formed by coating outside an inner part of a hole part formed in an insulating layer 9 above the light reception part 2 and constituting a clad part of a waveguide 10 together with the insulating layer 9, a core part 12 of the waveguide 10 made of a material having a higher refractive index than the material of the insulating layer 9 and the material of the film 11 formed by the coating, and formed inside the inner part of the hole part, and an in-layer lens having a lens surface 10A formed of an interface between the film 11 formed by the coating and the core part 12 at a bottom part of the hole part, and united with the waveguide 10. <P>COPYRIGHT: (C)2011,JPO&INPIT |
