| 摘要 |
PROBLEM TO BE SOLVED: To provide a cathode structure of an electron beam irradiation device capable of conveying and treating treated objects with different required exposures at the same time, and effectively utilizing an output of a direct-current high-voltage power source for accelerating electron. SOLUTION: A hole area rate of at least either a grid electrode or a drawer electrode of a cathode part is made differentiated in accordance with sites, or made zero as needed. COPYRIGHT: (C)2011,JPO&INPIT |
