| 摘要 |
PROBLEM TO BE SOLVED: To prevent breakage of a measuring probe or a measuring object, when starting supplying of a signal for measurement. SOLUTION: A device includes: a DC voltage output part 12 for outputting a signal S1 for resistance measurement; a resistance measuring part 13 for measuring a resistance value R between each conductor pattern 101, based on an electric signal generated, when the signal S1 for resistance measurement is supplied to a pair of conductor patterns 101; a capacitance measuring part 15 for measuring a capacitance value C between each conductor pattern 101; and a control part 18. The DC voltage output part 12 is constituted so as to be able to change a voltage value of the signal S1 for resistance measurement, and the control part 18 allows the capacitance measuring part 15 to measure the capacitance value C, prior to measurement of the resistance value R by the resistance measuring part 13, and executes output control processing for controlling the DC voltage output part 12 so that the increasing speed of the voltage value of the signal S1 for resistance measurement becomes lower, in proportion to the magnitude of the capacity value of the measured capacitance value C, when outputting of the signal S1 for resistance measurement is initiated. COPYRIGHT: (C)2011,JPO&INPIT |
