发明名称 LASER GAS ANALYZER AND GAS ANALYZING METHOD USING THE SAME
摘要 PROBLEM TO BE SOLVED: To provide a laser gas analyzer allowing calibration without taking an instrument off from a process line. SOLUTION: The laser gas analyzer emits a laser beam to a measurement gas and measures a gas concentration based on a change of the amount of light caused by light absorption of the laser beam. The laser gas analyzer includes: a laser diode; a dividing means for dividing the laser beam emitted from the laser diode into two directions; first and second light projection chambers which the divided light beams enter, and which have a predetermined length and are airtightly separated; first and second photodiodes for receiving the laser beams having passed through the light projection chambers and the measurement gas; and first and second light receiving chambers having the photodiodes provided therein, having a predetermined length, and airtightly separated. COPYRIGHT: (C)2011,JPO&INPIT
申请公布号 JP2010286349(A) 申请公布日期 2010.12.24
申请号 JP20090140210 申请日期 2009.06.11
申请人 YOKOGAWA ELECTRIC CORP 发明人 MATSUO JUNICHI;NANKO TOMOAKI
分类号 G01N21/27;G01N21/39 主分类号 G01N21/27
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