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发明名称
摘要
申请公布号
JP2010541229(A)
申请公布日期
2010.12.24
申请号
JP20100526260
申请日期
2008.09.22
申请人
发明人
分类号
H01L29/06;H01L21/265;H01L21/336;H01L29/786
主分类号
H01L29/06
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