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发明名称
FILM FORMING DEVICE
摘要
申请公布号
KR101004192(B1)
申请公布日期
2010.12.24
申请号
KR20097014512
申请日期
2002.02.08
申请人
发明人
分类号
H01L21/205;C23C16/44;C23C16/455;H01J37/32;H01L21/285
主分类号
H01L21/205
代理机构
代理人
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