| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a discharge electrode capable of preventing deterioration of a dielectric layer on an electrode surface, uneven discharging, and rising of impedance of a whole circuit at treatment of an atmospheric pressure plasma discharging. <P>SOLUTION: The discharge electrode is provided with two opposing electrodes, and in these electrodes, there are formed dielectric layers on the facing side surfaces, and one of the dielectric layers has volume resistivity of 10<SP>11</SP>Ωcm or less. <P>COPYRIGHT: (C)2011,JPO&INPIT |
