| 摘要 |
PROBLEM TO BE SOLVED: To provide a circularity measuring apparatus which can perform continuous measurement even for an object under measurement having a notch or internal measurement of a small-diameter hole without stopping a measuring program. SOLUTION: The circularity measuring apparatus includes: a rotary table 14 on which an object under measurement is mounted; a contact type stylus 26 which is in contact with the nearly circular-shaped measurement surface of the object under measurement 24 in a tilted manner; a holding means 40 for holding the stylus 26 so that its tilt angle is changeable within a predetermined stroke range; a displacement detection means 42 for detecting the tilt angle displacement of the stylus 26 associated with the contact of the stylus 26 with the measurement surface; and a control means 32 for estimating the tip position of the stylus 26 on the basis of the output of the displacement detection means 42 and directing an optimal stroke range for the stylus position to the holding means. COPYRIGHT: (C)2011,JPO&INPIT |
