| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a particle beam irradiation apparatus achieving a highly accurate beam irradiating position close to actualization based on actual data. <P>SOLUTION: Each of X direction and Y direction inverse mapping mathematical expression models is a polynomial including both of two variables when displaying target irradiation position coordinates on the irradiation position plane of a charged particle beam by the two variables. An unknown coefficient included in the polynomial is obtained by the following processes: two or more sets of preset X direction and Y direction command values are inputted to X direction and Y direction scanning electromagnets to thereby control the charged particle beam; and the actual data of respective actually irradiated irradiation position coordinates are subjected to a weighted least squares method for performing low weighting on some of the data. <P>COPYRIGHT: (C)2011,JPO&INPIT |
