PHASE CHANGE MEMORY UTILIZING CARBON NANOTUBE, AND METHOD OF MANUFACTURING THE SAME

摘要

PROBLEM TO BE SOLVED: To provide a phase change memory utilizing a carbon nanotube, which dramatically reduces a contact area between a phase change substance and a lower electrode, is operated while saving power, and further improves the degree of integration, and to provide a method of manufacturing the phase change memory.

SOLUTION: The phase change memory utilizing the carbon nanotube includes: a current source electrode for supplying an external current; a phase change substance layer having at least two different states; a plurality of carbon nanotube electrodes arranged between the current source electrode and the phase change substance layer; an insulator formed on the outside of the carbon nanotube electrodes; and a heat generating resistor layer formed between the carbon nanotube electrodes and the phase change substance layer and contacting with the carbon nanotube electrodes.

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