,申请号JP20100527926-传众专利搜索

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发明名称
摘要
申请公布号	JP2010541276(A)	申请公布日期	2010.12.24
申请号	JP20100527926	申请日期	2007.10.04
申请人		发明人
分类号	H01L21/205;C23C16/34	主分类号	H01L21/205
代理机构		代理人
主权项
地址

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