| 摘要 |
<P>PROBLEM TO BE SOLVED: To adjust light intensity of illumination light passing through a predetermined region in an illumination optical system with simple constitution. <P>SOLUTION: The illumination optical device, which illuminates the pattern surface of a reticle R with the illumination light IL, includes: an aperture stop 10A having an aperture through which the illumination light IL passes; diaphragms 12A to 12C for adjustment, which are arranged overlapping the aperture and have light shield lines defining the aperture shape of the aperture stop 10A; and an optical member from a first relay lens 13 to a capacitor optical system 17, which illuminates the pattern surface with the illumination light IL having passed through the aperture shape. <P>COPYRIGHT: (C)2011,JPO&INPIT |
