| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To enable measurement of a trace gas up to ppm order without upsizing a device and increasing a cost with an improved accuracy in measurement values. <P>SOLUTION: A highly-sensitive gas analyzer for quantitatively measuring a trace gas includes a gas-to-be measured reservoir 21 to store the gas, a small container 23 to connect the gas reservoir through a first opening and closing valve, a buffer tank 25 with a volume greater than 2,000 times of that of the small container, to connect the small container through a second opening and closing valve, a manifold 27 to connect the buffer tank through piping, a quadrupole type mass spectrometer 30 with an evacuation device composed of a turbo molecular pump and a diaphragm pump having a third opening and closing valve interposed on an inlet port side, to connect the manifold, an orifice to flow the gas in the quadrupole type mass spectrometer, and bypass piping 38 with a fourth opening and closing valve interposed, to connect the manifold and the turbo molecular pump. <P>COPYRIGHT: (C)2011,JPO&INPIT</p> |
