发明名称 |
SELF-ALIGNED NANO-SCALE DEVICE WITH PARALLEL PLATE ELECTRODES |
摘要 |
A contiguous deep trench includes a first trench portion having a constant width between a pair of first parallel sidewalls, second and third trench portions each having a greater width than the first trench portion and laterally connected to the first trench portion. A non-conformal deposition process is employed to form a conductive layer that has a tapered geometry within the contiguous deep trench portion such that the conductive layer is not present on bottom surfaces of the contiguous deep trench. A gap fill layer is formed to plug the space in the first trench portion. The conductive layer is patterned into two conductive plates each having a tapered vertical portion within the first trench portion. After removing remaining portions of the gap fill layer, a device is formed that has a small separation distance between the tapered vertical portions of the conductive plates.
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申请公布号 |
US2010319962(A1) |
申请公布日期 |
2010.12.23 |
申请号 |
US20090488948 |
申请日期 |
2009.06.22 |
申请人 |
INTERNATIONAL BUSINESS MACHINES CORPORATION |
发明人 |
CLEVENGER LAWRENCE A.;LI ZHENGWEN;PETRARCA KEVIN S.;QUON ROGER A.;RADENS CARL J.;SAPP BRIAN C. |
分类号 |
H01B5/14;B05D5/12 |
主分类号 |
H01B5/14 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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