发明名称 |
LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD |
摘要 |
A lithographic apparatus and device manufacturing method is provided in which exposure is carried out by projecting through a liquid having a pH of less than 7, the liquid being in contact with a substrate to be exposed. The liquid advantageously comprises an anti-reflective topcoat.
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申请公布号 |
US2010321652(A1) |
申请公布日期 |
2010.12.23 |
申请号 |
US20100872683 |
申请日期 |
2010.08.31 |
申请人 |
ASML NETHERLANDS B.V. |
发明人 |
STREEFKERK BOB;DIERICHS MARCEL MATHIJS THEODORE MARIE;GOHOEL-VAN ANSEM WENDY FRANSISCA JOHANNA |
分类号 |
G03B27/52;G03F7/20;H01L21/027 |
主分类号 |
G03B27/52 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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