| 摘要 |
An evaporation apparatus for EL materials is provided. The invention is an evaporation apparatus having a movable evaporation source (17) and a substrate rotating unit (12), in which the space between an evaporation source holder and a workpiece (substrate) (d) is narrowed to 30cm or below, preferably 20cm, more preferably 5 to 15cm, to improve the utilization efficiency for EL materials. In evaporation, the evaporation source holder is moved in the X-direction or the Y-direction, and the workpiece (substrate) is rotated for deposition. <IMAGE> <IMAGE> |
