发明名称 METHOD OF PRODUCING SILICON SINGLE CRYSTAL
摘要 In a method of producing a silicon single crystal through a Czochralski method, the pulling process includes a process of conducting a neck trial pulling for the formation of a neck portion after a seed crystal is dipped into a melt and before a neck actual pulling for the formation of a neck portion is conducted, and it is judged whether or not a temperature of the melt is a temperature suitable for the formation of the neck portion from a change of a diameter in the neck portion formed by the neck trial pulling.
申请公布号 US2010319612(A1) 申请公布日期 2010.12.23
申请号 US20100819930 申请日期 2010.06.21
申请人 SUMCO CORPORATION 发明人 SAITOU MASAO;TAKANASHI KEIICHI
分类号 C30B15/00 主分类号 C30B15/00
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