发明名称 CARBON NANOTUBE RESISTOR, SEMICONDUCTOR DEVICE, AND MANUFACTURING METHOD THEREOF
摘要 A process for producing a carbon nanotube resistor that is capable of providing a highly reliable resistor or fuse. The process comprises the step of introducing a carbon nanotube in a volatile solvent to a first concentration and conducting ultrasonic treatment thereof to thereby obtain an initial solution; the dilution step of stepwise diluting the initial solution with a volatile solvent under ultrasonication so as to adjust the same to a second concentration, thereby obtaining a coating solution; and the step of applying the coating solution between a fist electrode and a second electrode, wherein the first concentration is 1(E10−4 g/ml or higher and the second concentration lower than 1(E10−5 g/ml.
申请公布号 US2010320569(A1) 申请公布日期 2010.12.23
申请号 US20080526245 申请日期 2008.01.18
申请人 NARITA KAORU 发明人 NARITA KAORU
分类号 H01L29/8605;H01L21/02 主分类号 H01L29/8605
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