HERMETIC CONTAINER FOR THERMAL CONVERSION REACTION
摘要
The present invention relates to a hermetic container for a thermal conversion reaction. The hermetic container according to the present invention comprises: a base plate on which utilities are installed; a bezel for forming an enclosed hot zone between the base plate and itself; a heater disposed in the hot zone; an inlet and an outlet for feeding and discharging a reaction gas into and from the hot zone; and a heat exchanger provided inside the bezel for allowing the reaction gas being fed into the hot zone via the inlet to absorb heat energy that is transferred to the bezel such that the temperature of the bezel cools down and also the reaction gas is fed into the hot zone in heated state. Accordingly, in the process of feeding the reaction gas into the hot zone through the heat exchanger provided inside the bezel, heat energy that is transferred from a heater of the hot zone to the bezel and then lost to outside is absorbed by the reaction gas being fed into the hot zone, such that the bezel is prevented from overheating to a temperature above the critical temperature; and because the reaction gas is heated by absorbing the heat energy that was lost to outside the bezel and then fed into the hot zone, power consumption of the heater can be lowered.
申请公布号
WO2010107262(A3)
申请公布日期
2010.12.23
申请号
WO2010KR01686
申请日期
2010.03.18
申请人
SUSUNGTECH CO.,LTD;HANKOOK SILICON CO., LTD.;YOUN, SOON KWANG;JUNG, JAE CHUL;KIM, TAE SOO;KIM, TAE HYUNG;YOU, SUN IL;KIM, KYUNG HO
发明人
YOUN, SOON KWANG;JUNG, JAE CHUL;KIM, TAE SOO;KIM, TAE HYUNG;YOU, SUN IL;KIM, KYUNG HO