RAPIDLY ROTATING VACUUM PUMP

摘要

A rapidly rotating vacuum pump includes: a magnet-mounted rotor driven by an electric drive motor with a predetermined constant nominal rotational frequency (fnom). The rotor and a rotor bearing are embodied in such a way that the bending-critical counter-rotational resonance frequency (fcrit) is between 3% and a maximum of 30% above the nominal rotational frequency (fnom), thereby preventing an overspeed.