发明名称 METHOD FOR MANUFACTURING A PLURALITY OF SEMICONDUCTOR CHIPS
摘要 Disclosed is a method for manufacturing a plurality of semiconductor chips using a semiconductor substrate which has a plurality of first regions and a plurality of second regions that are positioned between the first regions. The method includes: a) a step of forming, in the second regions, a plurality of thick board portions and a plurality of thin board portions which include the first regions, by partially etching the rear surfaces of the first regions; b) a step of processing the rear surfaces of the thin board portions, corresponding to the type of the semiconductor chips to be manufactured; and c) a step of cutting and separating the first regions one from the other by cutting the semiconductor substrate along the boundaries between both the sides of respective second regions and the first regions.
申请公布号 WO2010147028(A1) 申请公布日期 2010.12.23
申请号 WO2010JP59697 申请日期 2010.06.08
申请人 MITSUMI ELECTRIC CO., LTD.;FUJIOKA, YASUHIDE;KANNBARA, KOUJI;KIKUCHI, HIROAKI 发明人 FUJIOKA, YASUHIDE;KANNBARA, KOUJI;KIKUCHI, HIROAKI
分类号 H01L21/301;H01L21/336;H01L29/739;H01L29/78 主分类号 H01L21/301
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