| 摘要 |
<p>PURPOSE: The pellicles mounting location measure system of photomask and method of measurement using the same automatically measures distance to pellicle from the edge of photomask by using the robot arm. CONSTITUTION: The stage(210) supports the photomask(100) in which the pellicle(120) is attached. Transport units are arranged in on the stage. The transport unit is arranged to photomask in order to mobile. It is attached to the end part of the transport unit and detecting apparatuses(231, 232, 233, 234) detect the contact whether or not with pellicle.</p> |
