发明名称 METHOD FOR CORRECTING A CONTROL OF AN OPTICAL SCANNER AND THE OPTICAL SCANNER
摘要 In a method for correcting a control of an optical scanner (14) which has a beam deflecting element (31) for deflecting a beam of optical radiation and a drive unit (30, 30′) for moving the beam deflecting element (31), said drive unit deflecting a beam of optical radiation directed at the beam deflecting element (31) according to a predetermined target movement using at least one parameter and/or a transfer function, preferably optical, said parameter or transfer function being used to control or regulate the system. In a determination step at least one current value of a drive unit transfer function that reproduces the response of the drive unit (30, 30′) to a predetermined target movement or a change in a target movement is ascertained for at least one frequency, and in a correction step at least one parameter and/or the transfer function is corrected as a function of the current value of the drive unit transfer function.
申请公布号 US2010321752(A1) 申请公布日期 2010.12.23
申请号 US20100823242 申请日期 2010.06.25
申请人 CARL ZEISS MICROIMAGING GMBH 发明人 STEINERT JOERG;ENGEL JOERG
分类号 G02B26/10 主分类号 G02B26/10
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