| 摘要 |
Provided is a nonvolatile semiconductor memory device and a method of manufacturing the same. The nonvolatile semiconductor memory device may include a tunnel insulating layer formed on a semiconductor substrate, a charge trap layer including a dielectric layer doped with a transition metal formed on the tunnel insulating layer, a blocking insulating layer formed on the charge trap layer, and a gate electrode formed on the blocking insulating layer. The dielectric layer may be a high-k dielectric layer, for example, a HfO2 layer. Thus, the data retention characteristics of the nonvolatile semiconductor memory device may be improved because a deeper charge trap may be formed by doping the high-k dielectric layer with a transition metal.
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