| 摘要 |
Provided is a diaphragm-actuated fluid control valve capable of, even in a region where the pressure difference between the pressures on the upper surface side and the lower surface side of a diaphragm is small, significantly changing the amount of lift of the diaphragm relative to the change in the pressure difference, without reducing the thickness of the diaphragm, and thus is capable of providing a predetermined flow rate and performing stable flow rate control. The control valve has a diaphragm 35 for driving a valve 25. The diaphragm 35 has a mountainous-wave portion 35b formed between an outermost portion 35a and an innermost portion 35c thereof, the mountainous-wave portion having the shape of concentric circles when viewed in a plan view and having N+(0.25 to 0.75) elevated portions that protrude upward or downward when viewed in cross section, where N is a positive integer (1, 2, 3, . . . ).
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