MEDIUM ENERGY ION SCATTERING SPECTROMETER

摘要

PURPOSE: A medium energy ion scattering spectrometer is provided to finely analyze the movement of elements on the surface and the interface by accurately measuring the scattering angle and the scattering position of ion beam. CONSTITUTION: A medium energy ion scattering spectrometer includes ion beam(10), a collimator(20), an accelerator(30), an ion beam pulse generator(40), a deflector, and a detector(60). The ion beam generates ion. Based on the ion, parallel beam is obtained using the collimator. The accelerator accelerates the parallel beam to obtain energy. The ion beam pulse generator pulses the accelerated ion beam. The deflector regulates the focus of the ion beam radiation. The detector detects the spectral signal of the ion beam pulse.