COATING APPARATUS FOR PARYLENE AND PRODUCTION METHOD OF SEQUENTIALLY LAYERED PARYLENE FILMS OR PARYLENE FILM WITH CONTROLLED COMPOSITION OF MIXED PARYLENE MONOMERS USING SAID COATING APPARATUS

摘要

PURPOSE: Parylene monomer, a parylene coating apparatus, and a method for manufacturing the hetero parylene thin film are provided to easily deposit a multi-layered thin film by successively depositing hetero parylene monomers. CONSTITUTION: Two or more separated parylene monomer evaporating parts(20, 20') are prepared. Monomer evaporating valves(21, 21') separately adjust the flow rate of evaporated parylene monomer. A mixing part(30) obtains the evaporated parylene monomer and supplies mixed parylene monomer to a thermal decomposing part(40). The thermal decomposing part thermally decomposes the parylene monomer.