CHARGED PARTICLE RADIATION DEVICE

摘要

Disclosed is a high-resolution, high-throughput charged particle radiation device that attenuates, in a short amount of time, the characteristic vibrations of ion pumps, said vibrations being excited by the reaction force when a stage is driven. Said charged particle radiation device also prevents power loops and current loops. The charged particle radiation device is provided with: a sample chamber (4) inside which a sample (3) is disposed; a charged particle radiation optical tube (1) for irradiating the sample (3) with charged particles (10); and ion pumps (2a, 2b) that evacuate the interior of the charged particle radiation optical tube (1). A frame (16) is fixed in the sample chamber (4) facing one end of the ion pumps (2a, 2b), and vibration-absorbing bodies are provided between the frame (16) and the one end of the ion pumps (2a, 2b). Each vibration-absorbing body comprises a layered structure in which a viscoelastic sheet (20a, 20b) is sandwiched between metal plates (18a, 18b, 21a, 21b).