METHOD FOR MANUFACTURING SOI SUBSTRATE,申请号EP20070713948-传众专利搜索

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发明名称	METHOD FOR MANUFACTURING SOI SUBSTRATE
摘要
申请公布号	EP1983553(A4)	申请公布日期	2010.12.22
申请号	EP20070713948	申请日期	2007.02.08
申请人		发明人
分类号	H01L21/02;H01L21/762;H01L27/12	主分类号	H01L21/02
代理机构		代理人
主权项
地址

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